Ultraviolet-assisted pulsed laser deposition of barium strontium titanate on Si: Characterization of the interracial layer

Barium strontium titanate (BST) thin films were grown directly on Si substrates by the conventional and ultraviolet-assisted pulsed laser deposition techniques. X-ray photoelectron spectroscopy, x-ray diffraction and reflectivity, variable angle spectroscopic ellipsometry, current-voltage, capacitance-voltage, and high-resolution transmission electron microscopy were used to investigate the composition, thickness, and electrical properties of …