Photo-formation of interfacial layers during pulsed laser deposition of high-k dielectrics on silicon
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Overview
status
publication date
- April 2004
has subject area
- 02 Physical Sciences (FoR)
- 09 Engineering (FoR)
- 10 Technology (FoR)
- Applied Physics (Science Metrix)
published in
- Thin Solid Films Journal
presented at event
- EMRS 2003 Spring Conference Conference