Modelling of Failure Time Distributions for Interconnects Due to Stress Voiding and Electromigration

A status report is given on a comprehensive modeling project aimed at predicting failure time distributions of interconnect lines. We discuss our novel approach to calculate the evolution of stresses in lines using elastic response functions. It is argued that this approach makes it possible to model the stress and damage evolution in a large ensemble of lines efficiently so that statistically meaningful failure time distributions can be …