Conference
Development of Electrohydrodynamic Micropumps With Micropillar Electrodes
Abstract
Electrohydrodynamic (EHD) micropumps with three-dimensional 50μm × 50μm micropillar electrodes were fabricated and tested in this study. Two basic electrode configurations were investigated: (i) micropillar emitter and collector electrodes (symmetric) and (ii) micropillar emitter and planar collector electrodes (asymmetric). The micropumps were fabricated using chromium/gold planar electrodes with 3-D Nickel micro-pillars on a glass substrate …
Authors
Kazemi PZ; Selvaganapathy PR; Ching CY
Pagination
pp. 65-72
Publisher
ASME International
Publication Date
January 1, 2009
DOI
10.1115/mnhmt2009-18186
Name of conference
ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer, Volume 1