Test structures for CD and overlay metrology on alternating aperture phase-shifting masks Conference Paper uri icon

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authors

  • Smith, Spencer
  • Smith, S
  • McCallum, M
  • Walton, AJ
  • Stevenson, JTM
  • Harris, PD
  • Ross, AWS
  • Hourd, AC
  • Jiang, L

publication date

  • January 1, 2004