Conference
Lithographic patterning of metals on flexible plastic foils
Abstract
In this paper the challenges of patterning electrodes with separations in the micron and sub-micron range onto thin polyethylene naphthalate foils for use in biochips are discussed. It was found that it was necessary to improve the adhesion of the metal electrodes to the foil by using plasma treatment and/or an adhesion layer, and a quantitative measurement of this adhesion was preformed using a peel-off tester. Electrode patterning was …
Authors
Péter M; Furthner F; Deen J; de Laat WJM; Meinders ER
Volume
517
Pagination
pp. 3081-3086
Publisher
Elsevier
Publication Date
March 2009
DOI
10.1016/j.tsf.2008.11.096
Conference proceedings
Thin Solid Films
Issue
10
ISSN
0040-6090