SOFT-X-RAY PROJECTION LITHOGRAPHY Academic Article uri icon

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authors

  • WHITE, DL
  • BJORKHOLM, JE
  • BOKOR, J
  • EICHNER, L
  • FREEMAN, RR
  • JEWELL, TE
  • MANSFIELD, WM
  • MACDOWELL, AA
  • SZETO, LH
  • Taylor, David
  • TENNANT, DM
  • WASKIEWICZ, WK
  • WINDT, DL
  • WOOD, OR

publication date

  • July 1, 1991