authors
- WHITE, DL
- BJORKHOLM, JE
- BOKOR, J
- EICHNER, L
- FREEMAN, RR
- JEWELL, TE
- MANSFIELD, WM
- MACDOWELL, AA
- SZETO, LH
- Taylor, David
- TENNANT, DM
- WASKIEWICZ, WK
- WINDT, DL
- WOOD, OR
SOFT-X-RAY PROJECTION LITHOGRAPHY
Journal Articles
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- Research
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Overview
status
publication date
- July 1, 1991
has subject area
- 0204 Condensed Matter Physics (FoR)
- 0206 Quantum Physics (FoR)
- Applied Physics (Science Metrix)
published in
- Solid State Technology Journal