Conference
On the photoluminescence of as-deposited Tb-doped silicon oxides and oxynitrides fabricated by ECR-PECVD
Authors
Ramírez JM; Wojcik J; Berencén Y; Mascher P; Garrido B
Volume
9133
Publisher
SPIE, the international society for optics and photonics
Publication Date
May 1, 2014
DOI
10.1117/12.2052571
Name of conference
Silicon Photonics and Photonic Integrated Circuits IV
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X