A Novel Method for Bonding of Ionic Wafers Conferences

authors

• Howlader, Matiar
• Howalder, MR
• Suga, T
• Kim, MJ
• Itoh, N
• Deen, Jamal
• Mascher, Peter

status

• accepted 

publication date

• January 1, 2006

published in

• Proceedings - Electronic Components and Technology Conference  Journal

presented at event

• 56th Electronic Components and Technology Conference 2006  Conference

keywords

• Engineering
• Engineering, Electrical & Electronic
• Engineering, Manufacturing
• GLASS
• LINBO3 SINGLE-CRYSTALS
• LITHIUM-NIOBATE
• Materials Science
• Materials Science, Multidisciplinary
• SILICON
• Science & Technology
• Technology

Digital Object Identifier (DOI)

• 10.1109/ectc.2006.1645703

International Standard Book Number (ISBN) 10

• 1-4244-0151-8

start page

• 552

end page

• +

volume

• 2006