Conference
Zone plate focused soft x-ray lithography for fabrication of nanofluidic devices
Authors
Leontowich AFG; Hitchcock AP
Volume
8323
Publisher
SPIE, the international society for optics and photonics
Publication Date
March 1, 2012
DOI
10.1117/12.915803
Name of conference
Alternative Lithographic Technologies IV
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X