Si 1 s x-ray absorption spectra of epitaxial Si–Ge atomic layer superlattice and alloy films

The Si 1s (K-shell) x-ray absorption spectra of several [(Si)m(Ge)n]p atomic layer superlattices (ALS) and a range of SixGe1−x alloy thin films grown epitaxially on both Si(100) and Ge(100) have been investigated using plane-polarized synchrotron radiation. The near-edge spectral features of ALS and alloy samples with similar (average) chemical composition are remarkably similar. The spectra of both the strained ALS and alloy samples contain …