Journal article
Chemically Selective Soft X-ray Direct-Write Patterning of Multilayer Polymer Films
Abstract
Chemically selective soft X-ray direct-write patterning of trilayer polymer films was performed in a scanning transmission X-ray microscope, extending recent pioneering work on bilayer polymer films. Two trilayer polymer systems were examined: PMMA/PPC/PAN and PMMA/PEC/PAN, where PMMA = poly(methyl methacrylate), PPC = poly(propylene carbonate), PAN = polyacrylonitrile, and PEC = poly(ethylene carbonate). Each polymer layer was selectively …
Authors
Wang J; Stöver HDH; Hitchcock AP
Journal
The Journal of Physical Chemistry C, Vol. 111, No. 44, pp. 16330–16338
Publisher
American Chemical Society (ACS)
Publication Date
November 1, 2007
DOI
10.1021/jp072570s
ISSN
1932-7447