Conference
Variations in surface morphology of ion implanted InP after rapid thermal annealing
Abstract
Authors
Stevanovic DV; Ferret PL; Thompson DA
Pagination
pp. 409-413
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
January 1, 1990
DOI
10.1109/iciprm.1990.203057
Name of conference
International Conference on Indium Phosphide and Related Materials