Journal article
Desorption of ultraviolet-ozone oxides from InP under phosphorus and arsenic overpressures
Abstract
The thermal desorption of ultraviolet-ozone oxide on InP substrates prepared for molecular-beam epitaxy has been performed with overpressures of P2, As2, and As4. Surface analysis using reflection high-energy electron diffraction, Auger electron spectroscopy, and x-ray photoelectron spectroscopy and thermodynamic calculations indicate that thermal desorption proceeds via a reaction between the oxide and atomic phosphorus from the substrate to …
Authors
Hofstra PG; Thompson DA; Robinson BJ; Besland MP; Gendry M; Regreny P; Hollinger G
Journal
Journal of Applied Physics, Vol. 77, No. 10, pp. 5167–5172
Publisher
AIP Publishing
Publication Date
May 15, 1995
DOI
10.1063/1.359262
ISSN
0021-8979