Charged fractions of Li, B, C, N, F and Ne in the range of 30–130 keV backscattered from Au surfaces have been measured using a high resolution solid state detector. Li shows the highest charged fraction followed by F, B, Ne, N and C. These results are compared with existing theoretical predictions. A reduced velocity scaling, derived from capture and loss processes in the bulk, seems to unify N, B, Li and perhaps C. An exponential relationship, appropriate to near surface neutralization, appears to account for all ions except Ne. The semiempirical approach of Zaidins for describing the heavier ion charged fractions agrees reasonably well with the measured values for Ne, N and C but differs by a large amountfor Li, B and F.