General Feature Profile Simulator FPS-3D

FPS-3D is a Monte Carlo code designed for simulation of 2D and 3D feature profile evolution. The Monte Carlo particles, launched in correspondence with specified fluxes, interact with solid materials of the target. Each particle typically consists of many gas molecules, or ions, or electrons. A cellular model is used for presenting solid materials. FPS-3D is a general code in a sense that it can be applied to any geometry, any materials, any fluxes, and any set of reactions. All properties of materials and all reactions are specified separately in the chemistry file, while geometry, fluxes, and other parameters are specified in the input file and, if necessary, in the flux file. Predictive capability of FPS-3D comes from its ability to produce results in agreement with experiments for a wide range of conditions while using the same chemistry file. A case of Si and SiO2 etching in Cl/Ar-plasma is used for the demonstration.