Conference
Beam current and source life enhancement of the Bernas ion source for the precision implant 9500xR and xR80
Authors
Foad MA; Patel D; Burgess C; Devaney A
Editors
Ishidida E; Current M; Banerjee S; Larson L; Mehta S; Tasch A; Smith TC; Romig T
Pagination
pp. 424-427
Publisher
I E E E
Publication Date
January 1, 1997
ISBN-10
0-7803-3289-X
Name of conference
11th International Conference on Ion Implantation Technology
Conference place
TX, AUSTIN
Conference start date
June 16, 1996
Conference end date
June 21, 1996
Conference proceedings
ION IMPLANTATION TECHNOLOGY - 96