Conference
The applied materials xRLEAP ion implanter for ultra shallow junction formation
Authors
England J; Joyce L; Burgess C; Moffatt S; Foad M; Armour D; Current M
Editors
Ishidida E; Current M; Banerjee S; Larson L; Mehta S; Tasch A; Smith TC; Romig T
Pagination
pp. 470-473
Publisher
I E E E
Publication Date
January 1, 1997
ISBN-10
0-7803-3289-X
Name of conference
11th International Conference on Ion Implantation Technology
Conference place
TX, AUSTIN
Conference start date
June 16, 1996
Conference end date
June 21, 1996
Conference proceedings
ION IMPLANTATION TECHNOLOGY - 96