Annealing effect on the structure, mechanical and tribological properties of hydrogenated diamond-like carbon films

Hydrogenated diamond-like carbon (DLC) films were deposited on Si (100) wafers by a plasma enhanced chemical vapor deposition technique using CH4 plus H2 as the feedstock. The effect of annealing temperature on the structure, mechanical and tribological properties of the resulting films were investigated by means of Raman spectroscopy, Fourier transformation infrared spectroscopy nanoindentation, stress analyzer and friction and wear testing on …