Journal article
Pillar-array based optical sensor.
Abstract
An optical microcavity based on pillar arrays has been fabricated in Si/SiO(2) material system. Transmission measurement was taken and a quality factor as high as 27,600 was observed. This cavity was tested for sensing applications by immersing into optical fluids with accurate refractive indices. For refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. We also compare cavities consisting of pillars with …
Authors
Xu T; Zhu N; Xu MY-C; Wosinski L; Aitchison JS; Ruda HE
Journal
Optics Express, Vol. 18, No. 6, pp. 5420–5425
Publisher
Optica Publishing Group
Publication Date
March 15, 2010
DOI
10.1364/oe.18.005420
ISSN
1094-4087