Post-fabrication resonance trimming technique compatible with state-of-the-art foundry technology

Silicon photonics is widely received as the next-generation technology in telecommunications and data interconnects. The high standards in on-chip signal processing require very precise control over the device parameters which is jeopardized by fabrication variabilities. We demonstrate a resonance trimming technique which allows the resonance wavelength of a ring filter to be accurately modified. A 760-pm modification was achieved on a …