Conference
Comparison between simulated and experimental Au-ion profiles implanted in nanocrystalline ceria
Abstract
Radiation response of nanocrystalline ceria films deposited on a silicon substrate was investigated under a 3-MeV Au-ion irradiation at 300K. A uniform grain growth cross the ceria films is observed and effective densification of the ceria thin films occurs during irradiation. The Au ion profiling was measured by secondary ion mass spectrometry (SIMS) and compared to the Au ion distribution predicted by the Stopping and Range of Ions in Solids …
Authors
Moll S; Zhang Y; Zhu Z; Edmondson PD; Namavar F; Weber WJ
Volume
307
Pagination
pp. 93-97
Publisher
Elsevier
Publication Date
July 2013
DOI
10.1016/j.nimb.2012.12.119
Conference proceedings
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
ISSN
0168-583X