Conference
DEFECTS IN PHOTO-ASSISTED CBE-GROWN GAAS
Authors
GOODHEW PJ; BEANLAND R; FARRELL T
Editors
Abernathy CR; Bates CW; Bohling DA; Hobson WS
Series
MATERIALS RESEARCH SOCIETY CONFERENCE PROCEEDINGS
Volume
282
Pagination
pp. 39-44
Publisher
MATERIALS RESEARCH SOC
Publication Date
January 1, 1993
ISBN-10
1-55899-177-8
Name of conference
3RD BIENNIAL MEETING OF CHEMICAL PERSPECTIVES OF MICROELECTRONIC MATERIALS, AT THE 1992 FALL MEETING OF THE MATERIALS RESEARCH SOC
Conference place
MA, BOSTON
Conference start date
November 30, 1992
Conference end date
December 3, 1992
Conference proceedings
CHEMICAL PERSPECTIVES OF MICROELECTRONIC MATERIALS III
ISSN
0886-7860