Conference
Passive components integration in CMOS technology
Abstract
The present paper aims at integrating thin films as passive components in the Back End of Line of an industrial Si-based CMOS technology while keeping limited additional technological steps. TiNxOy and TixTayO thin films deposited by magnetron sputtering were respectively investigated as resistive and high-k materials dedicated to highly integrated resistors and capacitors. We report here on electrical characterizations of thin films of both …
Authors
Salimy S; Toutain S; Averty D; Challali F; Goullet A; Besland M-P; Rhallabi A; Landesman J-P; Saubat J-C; Charpentier A
Pagination
pp. 118-121
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
September 1, 2010
DOI
10.1109/essderc.2010.5618467
Name of conference
2010 Proceedings of the European Solid State Device Research Conference
Conference proceedings
2009 Proceedings of the European Solid State Device Research Conference
ISSN
1930-8876