- Fabrication of Silicon Photonics Devices

This chapter has been written on the assumption that the reader is approaching the subject of silicon photonics with a basic background in science or engineering, perhaps even some specic knowledge in the eld of photonics, but not necessarily any previous knowledge of microfabrication. It attempts to complement the rest of the book by presenting a basic foundation on micro-nanofabrication technology, materials, and processes, and a discussion …