Conference
Tunable index silicon nitride for CMOS photonics applications
Authors
Gardes FY; DomÃnguez Bucio T; Mastronardi L; De Paoli G; Jantzen SL; Skandalos I; Milosevic MM; Vitali V; Faneca J; Petropoulos P
Publisher
SPIE, the international society for optics and photonics
Publication Date
March 5, 2021
DOI
10.1117/12.2578387
Name of conference
Integrated Optics: Devices, Materials, and Technologies XXV