(Student Award, 2nd Place) Optical and Mechanical Properties of Europium-Doped Sicn Thin Films Prepared By Integrated Ecr-PECVD and Magnetron Sputtering

Silicon carbonitride (SiCN) is a wide bandgap semiconductor material that has drawn significant interest over the past few decades due to its excellent optical, electrical, and mechanical properties[1]. Rare earth doping in wide bandgap semiconductors has several prospective applications in the field of photoelectric devices, solid-state lasers, flat panel displays, and high-energy radiation detectors [2]. Among the various rare earth …