Quantitative auger electron analysis of titanium nitrides

Chemical analysis of titanium nitrides by Auger Electron Spectroscopy is complicated by the fact that the main Auger electron emission from nitrogen occurs at an energy that completely overlaps the transition from titanium. For this reason, most surface analysis of titanium nitride has been semiquantitative, at best. In this paper, Auger spectrum simulation techniques are used to establish that satisfactory accuracy can be attained in the …