Silicon Nitride Ring Resonators Based on Subwavelength Grating Metamaterials

We demonstrate subwavelength grating metamaterial ring resonators on a silicon nitride platform. We report an internal Q factor of 2.11∙10⁵ and 1.48 dB/cm propagation loss at 1540 nm wavelength. We discuss the potential of these novel devices for applications in evanescent field sensing and light amplification.