On the Influence of Hydrocarbon Precursors and Elemental Composition on the Dielectric Properties and Conduction Mechanism of Hydrogenated Silicon Carbonitride Thin Films

Ternary compound thin films have drawn interest since intermediate forms can be developed for materials with tunable properties. Among them, thin films of silicon carbonitride (SiCN) are widely used for protective hard coatings due to their superior mechanical and chemical properties such as high wear resistance, chemical and thermal stability at high temperatures, and hardness. Another area of application of SiCN thin films is as low …