Journal article
Characterization of Sequentially Plasma Activated Silicon, Silicon Dioxide and Germanium Surfaces and Bonded Interfaces for Low Temperature Applications
Authors
Kibria MG; Zhang F; Cormier K; Howlader M
Journal
ECS Meeting Abstracts, Vol. MA2010-02, No. 27, pp. 1750–1750
Publisher
The Electrochemical Society
Publication Date
July 8, 2010
DOI
10.1149/ma2010-02/27/1750
ISSN
2151-2043