Conference
Session 38 Solid-State and Nanoelectronic Devices - Active and Passive Components in CMOS-Compatible Technologies
Abstract
This session covers some important active and passive components that are created in CMOS-compatible technologies, and are suitable for current and emerging silicon-based electronic systems. The first paper introduces the design principles, processing techniques and experimental characteristics of tunable on-chip inductors using high-m permalloy thin films. These inductors, working up 5 GHz, had quality factors between 5 and 11 and up to 15% …
Authors
Kiyota Y; Deen J
Pagination
pp. 942-942
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
January 1, 2005
DOI
10.1109/iedm.2005.1609515
Name of conference
IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.