Chapter
Polymers
Abstract
Miniaturization through microfabrication and micromachining has revolutionized the world around us. From the modest start of the miniaturization of the meter-sized vacuum tube into a micron sized planar transistor, semiconductor microfabrication has brought about astounding changes to every technological facet of our lives. These microfabrication processes have evolved and been modified into advanced technologies that are pushing the boundaries …
Authors
Kumar V; Pallapa M; Rezai P; Selvaganapathy PR
Book title
Reference Module in Materials Science and Materials Engineering
Publisher
Elsevier
Publication Date
2016
DOI
10.1016/b978-0-12-803581-8.00522-1