Conference
Novel x-ray mask structure with low out-of-plane distortion
Authors
Jeon YJ; Choi S-S; Kim IY; Bin Chung H; Kim BW
Volume
3331
Pagination
pp. 511-517
Publisher
SPIE, the international society for optics and photonics
Publication Date
June 5, 1998
DOI
10.1117/12.309607
Name of conference
Emerging Lithographic Technologies II
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X