Journal article
A Multiagent-Based Decision-Making System for Semiconductor Wafer Fabrication with Hard Temporal Constraints
Abstract
This paper presents a decision-making system for semiconductor wafer fabrication facilities, or wafer fabs, with hard interoperation temporal constraints. The decision-making system is developed based on a multiagent architecture that is composed of scheduling agents, workcell agents, machine agents, and product agents. The decision-making problem is to allocate lots into each workcell to satisfy both logical and temporal constraints. A dynamic …
Authors
Yoon HJ; Shen W
Journal
IEEE Transactions on Semiconductor Manufacturing, Vol. 21, No. 1, pp. 83–91
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
February 1, 2008
DOI
10.1109/tsm.2007.914388
ISSN
0894-6507