Journal article
Nanobonding: A key technology for emerging applications in health and environmental sciences
Abstract
In this paper, surface-activation-based nanobonding technology and its applications are described. This bonding technology allows for the integration of electronic, photonic, fluidic and mechanical components into small form-factor systems for emerging sensing and imaging applications in health and environmental sciences. Here, we describe four different nanobonding techniques that have been used for the integration of various substrates — …
Authors
Howlader MMR; Deen MJ; Suga T
Journal
Japanese Journal of Applied Physics, Vol. 54, No. 3,
Publisher
IOP Publishing
Publication Date
March 1, 2015
DOI
10.7567/jjap.54.030201
ISSN
0021-4922