Journal article
On the Influence of Doping and Annealing on Oxygen-Related Defects in Silicon
Authors
Mascher P; Dannefaer S; Kerr D; Hahn SK
Journal
Materials Science Forum, Vol. 10-12, , pp. 869–874
Publisher
Trans Tech Publications
Publication Date
January 1, 1986
DOI
10.4028/www.scientific.net/msf.10-12.869
ISSN
0255-5476