Optical properties of nanostructures based on silicon rich silicon oxide (SRSO) thin films

In this paper we discuss important issues associated with the fabrication of silicon-rich silicon oxide (SRSO) thin films by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD), with compositions ranging from silicon dioxide, SiO2, to amorphous silicon, a-Si. This large range of compositions is reflected in a wide range of optical properties, which can be exploited for photonic applications, such as waveguide …