Conference
Novel waveguide MSM photodetectors on SOI substrates using silicides
Authors
Xu D-X; Janz S; Cheben P; Delage A
Volume
4293
Pagination
pp. 106-113
Publisher
SPIE, the international society for optics and photonics
Publication Date
May 18, 2001
DOI
10.1117/12.426927
Name of conference
Silicon-based and Hybrid Optoelectronics III
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X