Conference
High-efficiency subwavelength-engineered surface grating couplers in SOI and DSOI
Abstract
The coupling efficiency of a surface grating coupler is optimized for a an arbitrary buried oxide thickness by adjusting the grating radiation angle. The coupler is apodized using a subwavelength structure, allowing a single etch step fabrication. The measured coupling loss is −2.16dB with 3dB bandwidth of 64nm, for a minimum feature size of 100nm. It is also shown by simulations that by implementing this coupler in a double SOI (DSOI) wafer, …
Authors
Bencdikovic D; Chcbcn P; Schmid JH; XU D-X; Wang S; Janz S; Halir R; Ortega-Moñux A; Dado M
Pagination
pp. 41-42
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
August 1, 2014
DOI
10.1109/group4.2014.6962018
Name of conference
11th International Conference on Group IV Photonics (GFP)