Conference
Stress induced damages in SiOC and porous SiOC single via Kelvin structures investigation methodology, failure description and improved via barrier approaches
Authors
Fuchsmann A; Arnal V; Besling W; Brechet Y; Verdier M; Torres J
Editors
Erb D; Ramm P; Masu K; Osaki A
Pagination
pp. 259-263
Publisher
MATERIALS RESEARCH SOC
Publication Date
2004
ISBN-10
1-55899-814-4
Name of conference
21st Advanced Metallization Conference (AMC 2004)
Conference place
CA, San Diego
Conference start date
October 19, 2004
Conference end date
October 21, 2004
Conference proceedings
ADVANCED METALLIZATION CONFERENCE 2004 (AMC 2004)