Journal article
Thermochemical Analysis of Molybdenum Thin Films on Porous Alumina
Abstract
Molybdenum (Mo) thin films (thickness <100 nm) were physically deposited by e-beam evaporation on a porous alumina substrate and were analyzed for their stability and reactivity under various thermal and gas conditions. The Mo thin-film composites were stable below 300 °C but had no reactivity toward gases. Mo thin films showed nitrogen incorporation on the surface as well as in the subsurface at 450 °C, as confirmed by X-ray photoelectron …
Authors
Lee K; de Lannoy C-F; Liguori S; Wilcox J
Journal
Langmuir, Vol. 33, No. 38, pp. 9521–9529
Publisher
American Chemical Society (ACS)
Publication Date
September 26, 2017
DOI
10.1021/acs.langmuir.6b04149
ISSN
0743-7463