A surface micromachined thermopile detector array with an interference-based absorber

Abstract

A thermo-electric (TE) infrared detector array composed of 23 thermopiles, each with 5 thermocouples on a suspended beam of 650 × 36 µm2 dimensions, has been fabricated in a CMOS-compatible MEMS process. The array is used for realization of an IR micro-spectrometer in the 1–5 µm spectral range. Interference filter-based IR absorbers using titanium/aluminum layers with a silicon carbide cavity layer have been designed, fabricated and validated. …