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Multilayered MOEMS Tunable Spectrometer for...
Journal article

Multilayered MOEMS Tunable Spectrometer for Fluorescence Lifetime Detection

Abstract

Spectral and time-domain fluorescence from biological samples are powerful diagnostic tools. For applications requiring a compact integrated spectrometer, the microoptoelectromechanical system (MOEMS) is an enabling technology. To improve upon previous microspectrometers, a multilayered, folded design is taken here to improve theoretical resolution and throughput. This sub-cm3 prototype, based on MOEMS piezoelectric diffractive micrograting, …

Authors

Lo JF-J; Butte P; Fang Q; Chen S-J; Papaioanou T; Kim E-S; Gundersen M; Marcu L

Journal

IEEE Photonics Technology Letters, Vol. 22, No. 7, pp. 486–488

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Publication Date

April 1, 2010

DOI

10.1109/lpt.2010.2040995

ISSN

1041-1135