Investigation of a High Precision Hydrostatic Actuation System: How Nonlinearities Affect Its Performance

A prototype Electro-Hydraulic Actuator (EHA) system has demonstrated a positional accuracy in the order of 100 nanometer. Linearized models of the EHA have been formulated and have shown reasonable correlation to the performance of the physical EHA. However, these models predict zero steady state error (an impossible situation given the physical limitations of seals, friction etc.). Further, the prototype EHA indicates that the cut-off …