Conference
Photolithography fabrication of sol-gel ridge waveguides
Authors
Sara R; Touam T; Blanchetiere C; Saddiki Z; Saravanamuttu K; Du XM; Chrostowski J; Andrews MP; Najafi SI
Volume
3469
Pagination
pp. 118-123
Publisher
SPIE, the international society for optics and photonics
Publication Date
July 6, 1998
DOI
10.1117/12.312911
Name of conference
Organic-Inorganic Hybrid Materials for Photonics
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X