Conference
Low background, UHV compatible scintillator detector for the CLS cryo scanning soft X-ray microscope
Abstract
A new soft X-ray scanning transmission X-ray microscope (STXM) optimized for cryo spectro-tomography was designed and commissioned at the Canadian Light Source (CLS). The instrument was required to achieve ultra high vacuum and be compatible with in-situ plasma cleaning. It also required a scintillator detector, and the design of this detector had to evolve to meet these environmental requirements. The scintillator deposition technique, and the …
Authors
Leontowich AFG; Taylor DM; Wang J; Regier CN; Regier TZ; Berg R; Beauregard D; Dynes JJ; Senger C; Swirsky J
Volume
849
Publisher
IOP Publishing
Publication Date
June 2017
DOI
10.1088/1742-6596/849/1/012045
Conference proceedings
Journal of Physics Conference Series
Issue
1
ISSN
1742-6588