Journal article
Sealing SU-8 microfluidic channels using PDMS
Abstract
A simple method of irreversibly sealing SU-8 microfluidic channels using PDMS is reported in this paper. The method is based on inducing a chemical reaction between PDMS and SU-8 by first generating amino groups on PDMS surface using N(2) plasma treatment, then allowing the amino groups to react with the residual epoxy groups on SU-8 surface at an elevated temperature. The N(2) plasma treatment of PDMS can be conducted using an ordinary plasma …
Authors
Zhang Z; Zhao P; Xiao G; Watts BR; Xu C
Journal
Biomicrofluidics, Vol. 5, No. 4,
Publisher
AIP Publishing
Publication Date
December 1, 2011
DOI
10.1063/1.3659016
ISSN
1932-1058