Simple, calibrated deposition monitor incorporated into an electron beam evaporator

A simple deposition monitor has been incorporated into a thin-film evaporator. The compact evaporator uses electron bombardment of the tip of a source wire to create an atomic beam. The current of ions in that portion of the atomic beam which falls on a collimating aperture is used to monitor the film deposition. The ion current is linearly related to the atomic beam flux, therefore allowing more precise control of the deposition rate than is …