Conference
The Role of Impurities in the Formation of Voids in Silicon
Authors
Simpson PJ; Knights AP
Volume
445-446
Pagination
pp. 180-182
Publisher
Trans Tech Publications
Publication Date
February 19, 2004
DOI
10.4028/www.scientific.net/msf.445-446.180
Conference proceedings
Materials Science Forum
ISSN
0255-5476